Method and system for a pad structure for use with a semiconductor package

ABSTRACT

Systems and methods for substrate layers used in attaching devices to a semiconductor package are disclosed. A novel pad structure may be employed on a substrate layer which has pads, each pad having a common electrical potential. Multiple pad openings may be employed on a single pad, allowing the attachment of multiple terminals of one or more decoupling capacitors to a single pad. These pads and pad openings can be arranged according to the type of decoupling capacitor employed, allowing a greater total pad area to be utilized in conjunction with a set of pad openings, while simultaneously allowing the multiple pad openings on the pad to be placed closer together, reducing the ESL and ESR of the path between the semiconductor and the decoupling capacitors, increasing the mechanical reliability of the semiconductor package and allowing a higher density of decoupling capacitors to be coupled to a given area.

TECHNICAL FIELD OF THE INVENTION

The invention relates in general to methods and systems for coupling anapparatus to a semiconductor device, and more particularly, to a padstructure for attaching decoupling capacitors to a semiconductorpackage.

BACKGROUND OF THE INVENTION

Electronic systems are becoming a staple of modern life. Theseelectronic systems may be very simple systems, such as individual logicgates that are used for simple control circuits, moderately complexsystems, such as integrated logic circuits that are used for controllersand embedded processors, or much more complex systems utilized inpowerful computing architectures.

Almost universally, the frequency and power requirements for theseelectronic systems have been increasing. This is especially true whenreferring to microprocessor based computing systems. Besides thedisplay, the largest consumer of power in a computing system is the CPUmicroprocessor, and the higher the clock frequency of themicroprocessor, the greater that microprocessor's power consumption (allother aspects being equal). As the power consumption and frequency ofsemiconductor devices grows so does the simultaneous switching noise(SSN) induced by the switching of the internal circuits of thesemiconductor's core logic. This SSN is problematic, as it may causeinterference with other aspects of the semiconductor's operation, withassociated logic in other portions of the semiconductor, or with adevice in which the semiconductor is utilized.

An effective way of suppressing this noise is to attach decouplingcapacitors to the semiconductor, or a package containing thesemiconductor. Because inductance and resistance between a semiconductorand its power source contributes significantly to the SSN, in most casesthe closer decoupling capacitors are attached to a semiconductor devicethe smaller the SSN will be. FIG. 1 depicts a hierarchy of positions forthe attachment of decoupling capacitors. Ideally, decoupling capacitors110 will be coupled as closely to semiconductor 120 on package 130 aspossible.

Additionally, the effectiveness of these decoupling capacitors ispartially determined by how large the equivalent series inductance (ESL)and equivalent series resistance (ESR) are between the semiconductor andthe decoupling capacitors. These factors are influenced, in main, by twovariables: the type of decoupling capacitors used, and the path betweenthese capacitors and the semiconductor in question.

To minimize the former variable, various low ESL and ESR decouplingcapacitors are available from assorted vendors such as AVX, Murata andTDK. However, to minimize the latter variable is more difficult.Attaching the capacitors close to the semiconductor is one possiblesolution. To accomplish this, in many cases high-end microprocessorshave decoupling capacitors coupled to the bottom side of the packagewith which they are utilized, usually just beneath the die to which themicroprocessor is attached. FIG. 2 depicts one example of a method ofattaching decoupling capacitors in close proximity to a semiconductor.Die 310 containing an integrated circuit, such as a microprocessor, isattached to substrate 220. BGA balls 230 serve to couple die 310 to apower source or other signal lines. Decoupling capacitors 380 may alsobe attached to the side of substrate 220 opposite die 310, placing themin close proximity to die 310.

Typically, substrate 220, with which microprocessors or semiconductorsare packaged, is made of organic material (such as epoxy resin).Substrate 220 may be fabricated using build-up technology, which enableshigher wiring capability by having fine-line build-up layer(s) on bothsides of a coarser core substrate.

FIG. 3 illustrates a cross-sectional schematic of a package with anorganic substrate 220. Package 300 consists of die 310 C4 bumps 320build-up-layers 330, solder resist layers 340, microvias 350, core layer360, plated through holes 370, and decoupling capacitors 380. Decouplingcapacitors 380 are electrically coupled to the remainder of the packagethrough pads in solder resist layer 330 of substrate 220. These pads areusually of a single polarity and are isolated from one another by solderresist. A terminal of decoupling capacitor 380 may be attached to one ofthese pads, usually by soldering. In package 300, therefore, theelectrical path between operating device on die 310 and decouplingcapacitors 380 flows through C4 bumps 320, microvias 350, plated throughholes 360, microvias 350, pads in solder resist layer 340 to decouplingcapacitors 380.

FIGS. 4A, 4B and 4C depict examples of decoupling capacitors for usewith a semiconductor package like that pictured in FIG. 2. Decouplingcapacitor 400 may have eight terminals 410-480 as pictured in FIG. 4A,and these terminals 410-480 may be of alternating polarity (i.e.interdigitated), as depicted in FIG. 4B. Two capacitors may haveterminals with point symmetry to one another as depicted in FIGS. 4B and4C. As can be seen, identical terminal 410-480 have opposite polarity inthese capacitors. In one embodiment, capacitor 400 may be a fourcapacitor array. In other embodiments, capacitor 400 may be aninterdigitated capacitor of the type manufactured by AVX, Murata andTDK.

FIG. 5A shows a typical pad opening layout for use in attachingdecoupling capacitor 400 to a substrate. Pad openings 510-580 must belarge enough for soldering one terminal 410-480 of decoupling capacitor400. Recently, however, as the power consumption and frequency ofsemiconductors has increased, there has been a commensurate need formore decoupling capacitors 400 in a given package 300. Thus, toaccommodate a higher density of decoupling capacitors 400, pad openings510-580 have begun to shrink, as depicted in FIG. 5B. As a result ofthis shrinking pad opening 510-580 size, the number of microvias 350contacting pad openings 510-580 has decreased. Not only does thisdecrease the mechanical reliability of pads and pad openings 510-580,but it also increases the ESR and ESL of the complete electrical path,the very problem trying to be avoided.

To help ameliorate these electrical and mechanical issues, a padstructure akin to the one depicted in FIG. 6 may be used. Pads 610-680exist in solder resist layer 640. One pad opening 642 exists in each pad640 for attaching terminals 410-480 of decoupling capacitor 400. Oneterminal 410-480 is attached to each soldering area of pad opening612-682 within pad 610-680 having polarity matching terminal 410-480being attached. Pad openings 612-682 may be defined on pad 610-680 byoverlaying a solder mask layer on pads 610-680 during manufacturing of apackage.

Using this pad structure, pads have been laid out in a solder resistlayer of a substrate as depicted in FIG. 7. Pads 710, 720, 730 havingalternating polarity, are laid out in solder resist 740. One pad opening712, 722, 732 exists within each pad 710, 720, 730 for the coupling of aterminal 410-480 of decoupling capacitor 400 with correspondingpolarity. Each pad 710, 720, 730 is separated from every other pad 710,720, 730 by solder resist 740. Consequently, each pad 710, 720, 730 onsubstrate has only one pad opening 712, 722, 732.

Decoupling capacitor 400 of the type depicted in FIG. 4A may be attachedon the back side of a substrate using this pattern of pads and padopenings with alternating polarity as shown in FIG. 8. Terminals 410-480of capacitor 400 are attached to pad openings 812-882 of pads 810-880with matching polarity. This solution, however, conflicts with the needfor a high density of decoupling capacitors 400. Pads 810-880 areusually larger than pad openings 812-882 and must be isolated from oneanother by solder resist 890. Usually, 100-200 microns exists betweenindividual pads 810-880. Consequently, in a given area, decouplingcapacitors 400 may only be coupled to a substrate in as close aproximity to one another as the separation between individual pads810-880 and their corresponding openings 812-882 allow.

Thus, a need exists for mechanically reliable methods and systems forattaching decoupling capacitors to a package which allow a high densityof decoupling capacitors to be attached to a package whilesimultaneously decreasing both the ESL and ESR of the electrical path.

SUMMARY OF THE INVENTION

Systems and methods for substrate layers used in attaching devices to asemiconductor package are disclosed. These systems and methods mayimprove the electrical path between a semiconductor and a device bydecreasing one or both of the ESL and the ESR of the electrical path. Anovel pad structure may be employed on a substrate layer which has pads,each pad having a common electrical potential. Multiple pad openings maybe employed on a single pad, allowing the attachment of multipleterminals of one or more decoupling capacitors to a single pad. Thesepads and pad openings can be arranged according to the type ofdecoupling capacitor employed, including decoupling capacitors withdifferent terminal configurations. These novel pad structures allow agreater total pad area to be utilized in conjunction with a set of padopenings, while simultaneously allowing the multiple pad openings on thepad to be placed closer together, thereby reducing the ESL and/or theESR of the path between the semiconductor and the decoupling capacitorsand increasing the mechanical reliability of the semiconductor package.Additionally, because multiple pad openings within a single pad do nothave to be electrically separated they may be placed closer together,and consequently a higher density of decoupling capacitors may becoupled to a given substrate area.

In one embodiment, a substrate layer for use with a semiconductorpackage comprises a first pad with at least two pad openings and asecond pad with at least two pad openings wherein the second pad has apolarity opposite the first pad.

In another embodiment, each pad opening is operable to couple a terminalof a capacitor.

In yet another embodiment, the first pad and the second pad extend thelength of the substrate layer, the first pad comprises a first row ofpad openings and a second row of pad openings wherein the pad openingsin the first row are adjacent the pad openings in the second row, andthe second pad comprises a first row of pad openings and a second row ofpad openings wherein each pad opening in the first row of pad openingsis adjacent a pad opening in the first row of pad openings in the firstpad and the second row of pad openings is adjacent the first row of padopenings.

In still another embodiment, the capacitor is non-interdigitated.

In other embodiments, the capacitor is interdigitated.

In still other embodiments, the capacitor has at least two terminals,and a first terminal of the capacitor is coupled to a first pad openingin the first pad and a second terminal is coupled to a first pad openingin the second pad.

In one embodiment, the rows of pads are adjacent to each other such thateach pad within a row is aligned with a corresponding pad in eachadjacent row, and the corresponding pad in each adjacent row has anopposite polarity.

These, and other, aspects of the invention will be better appreciatedand understood when considered in conjunction with the followingdescription and the accompanying drawings. The following description,while indicating various embodiments of the invention and numerousspecific details thereof, is given by way of illustration and not oflimitation. Many substitutions, modifications, additions orrearrangements may be made within the scope of the invention, and theinvention includes all such substitutions, modifications, additions orrearrangements.

BRIEF DESCRIPTION OF THE DRAWINGS

The drawings accompanying and forming part of this specification areincluded to depict certain aspects of the invention. A clearerimpression of the invention, and of the components and operation ofsystems provided with the invention, will become more readily apparentby referring to the exemplary, and therefore nonlimiting, embodimentsillustrated in the drawings, wherein identical reference numeralsdesignate the same components. Note that the features illustrated in thedrawings are not necessarily drawn to scale.

FIG. 1 depicts an illustration of a hierarchy of locations wheredecoupling capacitors may be attached to a system containing asemiconductor device.

FIG. 2 depicts an illustration of a semiconductor package.

FIG. 3 depicts a cross-sectional illustration of a typical semiconductorpackage including decoupling capacitors.

FIG. 4A depicts a representation of one embodiment of a decouplingcapacitor.

FIGS. 4B and 4C represent two possible arrangements of the terminals ofthe decoupling capacitor depicted in FIG. 4A.

FIGS. 5A and 5B depict a representation of pad layouts suitable for usewith the decoupling capacitor represented in FIG. 4A.

FIG. 6 depicts an illustration of one embodiment of a pad structure.

FIG. 7 depicts an illustration of one embodiment of a pad structure.

FIG. 8 depicts utilizing the pad structure of FIG. 7 with decouplingcapacitor of the type depicted in FIG. 4A.

FIG. 9 depicts an illustration of another embodiment of a pad structure.

FIG. 10 depicts utilizing the pad structure of FIG. 9 with decouplingcapacitors of the type depicted in FIG. 4A.

FIG. 11A depicts an illustration of one embodiment of a decouplingcapacitor.

FIGS. 11B and 11C represent two possible arrangements of the terminalsof the decoupling capacitor depicted in FIG. 11A.

FIG. 12 depicts a representation of an embodiment of a pad layoutsuitable for use with the decoupling capacitors represented in FIGS. 11Band 11C.

FIG. 13 depicts one embodiment of a pad structure layout for use withthe decoupling capacitor represented in FIGS. 11B and 11C.

FIG. 14 depicts a second embodiment of a pad structure suitable for usewith the decoupling capacitor represented in FIGS. 11B and 11C:

FIG. 15A depicts an illustration of one embodiment of a decouplingcapacitor.

FIGS. 15B and 15C represent two possible arrangements of the terminalsof the decoupling capacitor depicted in FIG. 15A.

FIG. 16 depicts an illustration of a pad layout suitable for use withthe decoupling capacitor illustrated in FIGS. 15B and 15C.

FIG. 17 depicts one embodiment of a pad structure suitable for use withthe decoupling capacitor represented in FIGS. 15B and 15C.

FIG. 18A depicts an illustration of one embodiment of a decouplingcapacitor.

FIG. 18B represents a possible arrangement of the terminals of thedecoupling capacitor depicted in FIG. 18A.

FIG. 19 depicts one embodiment of a pad structure suitable for use withthe decoupling capacitor represented in FIGS. 18A and 18B.

FIG. 20A depicts an illustration of one embodiment of a decouplingcapacitor.

FIG. 20B represents a possible arrangement of the terminals of thedecoupling capacitor depicted in FIG. 20A.

FIG. 21 depicts one embodiment of a pad structure suitable for use withthe decoupling capacitor represented in FIGS. 20A and 20B.

FIG. 22 depicts one embodiment of a pad structure suitable for use withthe decoupling capacitor represented in FIGS. 20A and 20B.

DESCRIPTION OF PREFERRED EMBODIMENTS

The invention and the various features and advantageous details thereofare explained more fully with reference to the nonlimiting embodimentsthat are illustrated in the accompanying drawings and detailed in thefollowing description. Descriptions of well known starting materials,processing techniques, components and equipment are omitted so as not tounnecessarily obscure the invention in detail. Skilled artisans shouldunderstand, however, that the detailed description and the specificexamples, while disclosing preferred embodiments of the invention, aregiven by way of illustration only and not by way of limitation. Varioussubstitutions, modifications, additions or rearrangements within thescope of the underlying inventive concept(s) will become apparent tothose skilled in the art after reading this disclosure.

Reference is now made in detail to the exemplary embodiments of theinvention, examples of which are illustrated in the accompanyingdrawings. Wherever possible, the same reference numbers will be usedthroughout the drawings to refer to the same or like parts (elements).

A few terms are defined or clarified to aid in an understanding of theterms as used throughout the specification. The term “attach” isintended to mean a physical, electrical or any other type of coupling orany combination of these various types of couplings.

The term “set”, when used in the mathematical sense as in “a set of” isintended to mean a collection of zero or more elements.

The term “interdigitated” when used with respect to a decouplingcapacitor is intended to mean a decoupling capacitor whose terminalshave alternating polarity.

The term “linearly aligned” when used with respect to a set of padopenings means aligned along an axis.

The term “staggered” when used with respect to two pad openings meansnot directly adjacent to, or aligned with, one another. the term“disposed between” when used with respect to three pad openings means atleast one pad opening is not aligned with the other two pad openings onat least one axis.

The term “point symmetrical” when used with respect to two decouplingcapacitors means these decoupling capacitors have the same terminallayout, however the polarity of the same respective terminals on eachdecoupling capacitor are opposite one another.

Attention is now directed to systems and methods for substrate layersused in attaching devices to a semiconductor package. These systems andmethods may improve the electrical path between a semiconductor and adevice by decreasing one or both of the ESL and the ESR of theelectrical path. These systems and methods may be especially useful inphysically or electrically attaching a high density of decouplingcapacitors to a semiconductor package in close proximity to thesemiconductor. A novel pad structure may be employed on a substratelayer which has pads, each pad having a common electrical potential.Multiple pad openings may be employed on a single pad, allowing theattachment of multiple terminals of one or more decoupling capacitors toa single pad. These pads and pad openings can be arranged according tothe type of decoupling capacitor employed, including decouplingcapacitors with different terminal configurations.

These novel pad structures allow a greater total pad area to be utilizedin conjunction with a set of pad openings, while simultaneously allowingthe multiple pad openings on the pad to be placed closer together. Agreater total pad size allows a larger number of microvias to be placedbetween the pad and an internal build-up layer, this can reduce the ESLand ESR of the path between the semiconductor and the decouplingcapacitors because this greater pad area is usually covered with soldermask (except the pad openings/terminal connections), this novel padstructure may also exhibit increased mechanical reliability.Additionally, because multiple pad openings within a single pad do nothave to be electrically separated they may be placed closer together,and consequently a higher density of decoupling capacitors may becoupled to a given area.

FIG. 9 depicts one embodiment of a pad layout in accordance with thepresent invention for use with an eight terminal decoupling capacitorwhere the polarity of the terminals is point symmetrical, as depicted inFIGS. 4B and 4C. Solder resist layer 950 may have adjacent rows 902, 904of pads. Each row 902 of pads 910, 920, 930 and 940 may have a pad 910with four pad openings 912, 914, 916 and 918 and a certain polarity.Proximate to this pad 910 is two pad opening 922, 924 pad 920, having anopposite polarity, and proximate to this two opening 922, 924 pad 920 isanother two opening 932, 934 pad 930 having the same polarity as fouropening pad 910. Next to this second two opening pad 930 is another fouropening 942, 944, 946 and 948 pad 940 having an opposite polarity to thefirst four opening pad 910. Each pad 910, 920, 930 and 940 within a row902 may be adjacent to an identical pad with opposite polarity in theadjacent row 904. For example, four opening pad 910 with a negativepolarity in row 902 may be adjacent to four opening pad 960 with apositive polarity in adjacent row 904.

Pad openings 912, 914, 916 and 918, 922, 924, 932, 934, 942, 944, 946and 948 within pads 910, 920, 930 and 940, are used for attachingterminals 410-480 of decoupling capacitor 400 with a polarity matchingthe pad 910, 920, 930 and 940 in which pad openings 912, 914, 916 and918, 922, 924, 932, 934, 942, 944, 946 and 948 exist. For example, pad910 may have a negative polarity and pad opening 914 within pad 910 thatis operable to attach terminal 450 of decoupling capacitor 400 in thecase where the polarity of terminals 410-480 is arranged as in FIG. 4B.To continue with the above example, pad 920 may have a positive polarityand pad opening 922 within pad 920 that is operable to attach terminal460, pad 930 may have a negative polarity and pad opening 932 within pad930 that is operable to attach terminal 470 and pad 940 may have apositive polarity and pad opening 942 within pad 940 that is operable toattach terminal 480.

Each pad 910, 920, 930 and 940 may have multiple pad openings 912, 914,916 and 918, 922, 924, 932, 934, 942, 944, 946 and 948 for theattachment of terminals 410-480. Because multiple openings 912, 914, 916and 918 may occur on a single pad 910, openings 912, 914, 916 and 918occurring within this pad 910 do not have to be electrically isolatedfrom one another. In many cases, a 100 to 200 micron separation betweenpad openings 912, 914, 916 and 918 on a single pad 910 is desirable tokeep solder from flowing together during manufacture and possiblycreating mechanical reliability issues.

In any event, however, because each pad has a unique polarity and themultiple openings on any single pad 910, 920, 930 and 940 share thepolarity of pad 910, 920, 930 and 940, pad 910, 920, 930 and 940 mayencompass pad openings 912, 914, 916, 918, 922, 924, 932, 934, 942, 944,946 and 948 and any space between openings 912, 914, 916, 918, 922, 924,932, 934, 942, 944, 946 and 948 in a single pad 910, 920, 930 and 940.Contrast this with openings and pads of FIG. 7, where one opening 722exists per pad 720, and these pads 710, 720 and pad openings 712, 722must be electrically isolated from every other pad 710, 720 and padopening 712, 722. As a result, the area between pad openings 710, 720,formerly consumed by solder resist 740, may instead by devoted to thepad encompassing these openings. It can be seen that in the embodimentdepicted in FIG. 9, for any given group of pad openings 922, 924, thepad 920 encompassing this group of openings has a greater area than thecollective area of pads 710, 720 encompassing an identical number of padopenings 712, 722 in FIG. 7.

As a result of this greater pad area more micorvias 360 may be placedbetween any given pad 920 and build-up layer 360, which in turn lowersthe ESL and ESR of the path between die 310 and decoupling capacitors400. By the same token, however, because pad openings 912, 914, 916 and918, 922, 924, 932, 934, 942, 944, 946 and 948 share pad 910, 920, 930and 940 and the polarity of pad 910, 920, 930 and 940, pad openings 912,914, 916 and 918, 922, 924, 932, 934, 942, 944, 946 and 948 which sharepad 910, 920, 930 and 940 may be placed closer to one another thanindividual pads containing a single pad opening. This, in turn, allows ahigher density of pad openings 912-948 to be clustered in any given areaand commensurately, a higher density of decoupling capacitors 400 may beattached to substrate 220 when these decoupling capacitors 400 areattached to these pad openings 912-948. In some embodiments, becausepads 910, 920, 930 and 940 are larger and pads 910, 920, 930 and 940 arecovered by solder mask except for where the terminals are actuallysoldered to pad openings 912-948, the new structure is also better froma mechanical reliability standpoint.

It will be apparent to those of skill in the art that the enumeratedadvantages will accrue no matter the shape of a pad opening, number ofpad openings on the pad or size of the substrate on which these padstructures are used. For example, pad 910 having pad openings 912, 914,916 and 918 will exhibit all the mechanical, physical and electricaladvantages of pad 920 having pad openings 922, 924 and similarly allowthe coupling of a higher density of decoupling capacitors.

By making the polarity line of decoupling capacitors 400 symmetrical tothe next capacitor (as pictured in FIGS. 4B and 4C), the terminals ofdecoupling capacitors 400 may be aligned in such a manner that terminalsof multiple decoupling capacitors 400 can be attached to pad openings912-948 within a single pad. For example, pad 910 has four pad openings912, 914, 916 and 918 suitable for attaching four terminals of fourdifferent capacitors 400. By making the polarity line of capacitors 400point symmetrical to one another one terminal 410-480 of four differentdecoupling capacitors 400 may be attached to each pad opening 912, 914,916 and 918 within a pad 910. By having multiple pad openings 912, 914,916 and 918 in one pad 910, and multiple capacitors 400 sharing thesemultiple pad openings 912, 914, 916 and 918, a higher density ofcapacitors 400 may be attached to a given area of substrate 950.

This arrangement of pads and decoupling capacitors is illustrated inmore detail in FIG. 10. As can be seen, pad openings 912, 914, 916 and918 of pad 910 are each attached to one terminal of decouplingcapacitors 980-986. Decoupling capacitors 980, 986, 988 may haveterminals arranged like those depicted in FIG. 4B, while decouplingcapacitors 982 and 984 may have terminals arranged like those in FIG.4C. Notice that by repeating the pattern of pads 910, 920, 930 and 940within a row, by utilizing adjacent rows 902, 904 with adjacent oppositepolarity pads 910, 960, pads within a row 902 may be utilized to couplemultiple capacitors. For example, terminal 480 of decoupling capacitor982 may be coupled to pad opening 914 of pad 910 while terminal 410 maybe coupled to a pad opening of adjacent pad 960 in adjacent row 904.Using the pad structure depicted in FIG. 9, a higher density ofdecoupling capacitors may be coupled to the same area using the, asdepicted in FIG. 10. This can be seen, for example, when comparing thedensity of decoupling capacitors 400 of FIG. 8 with decouplingcapacitors 980-988 of FIG. 10.

It will be apparent to those of skill in the art after reading thisdisclosure that traditional manufacturing processes may be utilized toachieve the pad structures disclosed herein. Including masks,photomasks, x-ray masks, mechanical masks, oxidation masks, lithographyetc. In some embodiments, during manufacture of package, to avoidshortage and stabilize self-aligning effect during reflowing (soldering)process, solder mask coats the surface except for the pad connectingarea.

Again, as mentioned above, the various advantages of the systems andmethods of the present invention will accrue no matter what theembodiment of the layout of the pad structure, so long as at least oneof the resulting pads contains multiple openings for coupling terminalsof a decoupling capacitor. This may be illustrated in more detail bydepicting configurations for a variety of decoupling capacitors andembodiments of novel pad structures designed for these configurations.These various embodiments allow for closely grouped pad openings and aresulting high density of decoupling capacitors when they are attachedto these pad openings.

FIGS. 11A, 11B and 11C depict an example of another type of decouplingcapacitor for use with a semiconductor package like that pictured inFIG. 2. Decoupling capacitor 1100 may have ten terminals 1101-1110 aspictured in FIG. 11A. These terminals 1101-1110 may be of alternatingpolarity, as depicted in FIG. 11B and the polarity line of twodecoupling capacitors 1100 may be symmetrical to one another (aspictured in FIGS. 11B and 11C). FIG. 12 shows a typical pad openinglayout used for attaching decoupling capacitor 1100 to a substrate.

FIGS. 13 and 14 depict embodiments of novel pad structures for allowinga higher density of decoupling capacitors of the type pictured in FIGS.11A, 11B and 11C to be coupled to a substrate. In one embodiment,depicted in FIG. 13, two rows of pads 1302, 1304 each having a twoopening pad 1310, 1360 and a multiple opening pad 1320, 1350, whereinthe two opening pad 1302, 1304 has an opposite polarity from, and issurrounded by but not touching, the multiple opening pad 1320, 1350.Between these two rows of pads 1302, 1304 are two adjacent pads 1330,1340 of opposite polarity having pad openings 1331, 1332, 1341, 1342arranged linearly within their respective pad 1330, 1340. Each of thesepads 1330, 1340 is adjacent to a row of pads 1302, 1304 where themultiple opening pad 1320, 1350 has an opposite polarity. Additionally,pad openings 1321, 1322, 1331, 1332, 1341, 1342, 1351, 1352 in multipleopening pad 1320, 1350 and pads 1330, 1340 may be adjacent one another.

Pad openings 1311, 1312, 1361, 1362 used for attaching end terminals1110, 1109 of decoupling capacitor 1110 with the same polarity may sharea pad, while pad openings used for terminals 1101-1104 and 1105-1008 ofthe same polarity may share a pad. As can be seen in FIG. 13, pads 1310,1320 1330, 1340, 1350, 1360 have pad openings 1311, 1321, 1322, 1331,1332, 1341, 1342, 1351, 1352, 1361 coupled to terminals 1101-1110 ofdecoupling capacitor 1391. Pads 1310, 1320 1330, 1340, 1350, 1360 mayalso contain other pad openings for the coupling of other decouplingcapacitors 1392. For example, by repeating the pad and row of padstructures, and using another decoupling capacitor 1392 with pointsymmetry, pad 1310 may also contain pad opening 1312 for the coupling ofterminal 1109 of decoupling capacitor 1392, and pad 1320 may contain padopenings 1324 and 1326 for the coupling of terminals of decouplingcapacitor 1392.

Pad openings 1321, 1322 and 1326, which are used to couple threedifferent terminals 1101, 1104 and 1105 of two different capacitors,share pad 1320, while pad openings 1311 and 1312 used for coupling endterminals 1109, 1110 of two different decoupling capacitors 1391, 1392,share pad 1310. By virtue of having multiple pad openings sharing asingle pad, a greater concentration of microvias 360 may couple thesepads to plated through holes 370, providing the mechanical advantageselaborated on with respect to FIG. 9 while allowing a higher density ofdecoupling capacitors 1100 to be coupled to substrate 220.

Turning now to FIG. 14, another embodiment of a pad structure for usewith a decoupling capacitor of the type picture in FIGS. 11A, 11B and11C which may allow an even higher density of decoupling capacitor to beattached to a substrate is illustrated. In this particular case, pads1410, 1420, 1430 and 1440 may contain pad openings 1411, 1412, 1421,1422, 1431, 1432, 1441 and 1442 arranged linearly within theirrespective pads. Each pad 1410, 1420, 1430 and 1440 is adjacent toanother pad 1410, 1420, 1430 and 1440 with an opposite polarity, and padopenings 1411, 1412, 1421, 1422, 1431, 1432, 1441 and 1442 within eachpad may be adjacent to pad openings 1411, 1412, 1421, 1422, 1431, 1432,1441 and 1442 in an adjacent pad. For example, pad 1410 with a positivepolarity may be adjacent to pad 1420 having a negative polarity, and padopening 1411 in pad 1410 may be adjacent to pad opening 1422 in adjacentpad 1420. Pads 1450 and 1460 may contain pad openings 1451, 1452, 1461staggered with respect to, or disposed between, pad openings 1411, 1412,1421, 1422, 1431, 1432, 1441 and 1442 of pads 1410-1440, and may beadjacent to a pad 1410-1440 with opposite polarity. For example, padopening 1451 in pad 1450 with positive polarity is staggered withrespect to pad openings 1411, 1412 in pad 1410 with positive polarity.

Staggered pad openings 1451, 1461 allow decoupling capacitors 1491, 1492to be staggered with respect to one another. This staggering, in turn,allows an even higher density of decoupling capacitors 1491, 1492 to beattached to a substrate. Additionally, the arrangement depicted in FIG.14 allows pads 1410-1460 to be substantially parallel to one another,easing both the cost and difficulty of manufacturing such a padstructure. By repeating the pad 1410-1460 structure, and using anotherdecoupling capacitor 1492 with point symmetry, pad 1450 may also containpad opening 1352 for the coupling of terminal 1109 of decouplingcapacitor 1492. By virtue of having multiple pad openings sharing asingle pad, a greater concentration of microvias 360 may couple thesepads to plated through holes 370, providing the mechanical advantageselaborated on with respect to FIG. 9 while allowing a higher density ofdecoupling capacitors 1491, 1492 to be coupled to substrate 220.

Moving to FIGS. 15A, 15B and 15C, another type of capacitor which may beutilized with embodiments of the present invention is depicted.Capacitor 1500 may be an area array type capacitor with sixteenterminals 1501-1516 arranged in a four by four square. Each terminal1501-1516 may have a polarity and the polarity line of two decouplingcapacitors 1500 may be symmetrical to one another. In one embodiment,the polarity of each of terminals 1501-1516 is like that depicted inFIG. 15B while in another embodiment the polarity of each of terminals1501-1516 is the inverse, as depicted in FIG. 15C. FIG. 16 illustrates alayout of pad openings for use with decoupling capacitor 1500 of FIGS.15A, 15B and 15C. In one embodiment, terminals 1501-1516 of capacitor1500 are a ball grid array as is known in the art.

FIG. 17 illustrates one embodiment of a pad structure for use with acapacitor of the type depicted in FIGS. 15A, 15B and 15C, which mayallow capacitors 1500 to be coupled to a substrate with high density.Square pads 1710, 1720, 1730, 1740 contain four pad openings, whilerectangular pads 1721-1728 contain two pad openings. Square pads 1710,1720, 1730, 1740 may be adjacent to a rectangular pad 1721-1728 of anopposite polarity, which may be adjacent to another rectangular pad1721-1728 with an opposite polarity from this first rectangular pad1721-1728. This second rectangular pad may be adjacent to a secondsquare pad 1710, 1720, 1730, 1740 with a polarity opposite the firstsquare pad. For example, square pad 1710 with a negative polarity may beadjacent to rectangular pad 1721 with a positive polarity, which isadjacent to another rectangular pad 1722 with a negative polarity, whichis in turn adjacent to a second square pad 1730 with a positivepolarity. Square pad 1730 with a positive polarity may be adjacent torectangular pad 1723 with a negative polarity, which is adjacent toanother rectangular pad 1724 with a positive polarity, which is in turnadjacent to a third square pad 1720 with a negative polarity. In turn,square pad 1720 with a negative polarity may be adjacent to rectangularpad 1725 with a positive polarity, which is adjacent to anotherrectangular pad 1726 with a negative polarity, which is in turn adjacentto a fourth square pad 1740 with a positive polarity. Square pad 1740with a positive polarity may be adjacent to rectangular pad 1727 with anegative polarity, which is adjacent to another rectangular pad 1728with a positive polarity, which is in turn adjacent to the first squarepad 1710 with a negative polarity.

Square pads 1710, 1720, 1730, 1740 and rectangular pads 1721-1728 may bearranged in this manner such that square pads 1710, 1720, 1730, 1740 arearranged at four corners of a square, with two rectangular pads1721-1728 between each square pad 1710, 1720, 1730, 1740. Additionally,circular pads 1731-1734 having one pad opening may be located proximatea square pad 1710, 1720, 1730, 1740 with the same polarity.

Pad openings in square 1700 of pad openings may be used for attaching acapacitor of the type depicted in FIG. 14 c. Pad openings 1701 and 1716may have negative polarity for attaching terminal 1501, 1516 ofdecoupling capacitor 1500. These pad openings may share pads 1710, 1720with three other pad openings of the same polarity. Similarly, padopenings 1704, 1713 may have positive polarity for attaching terminals1504, 1513 of decoupling capacitor 1500. These pad openings 1704, 1713may share pads 1730, 1740 with three other pad openings of the samepolarity. Pad openings 1702, 1703, 1705, 1708, 1709, 1712, 1714 and 1715may share pads with another pad opening of the same polarity. Theseshared pads offer the same advantages elaborated on above.

As can be seen, pad openings 1700 may accommodate decoupling capacitor1500 with a terminal arrangement like that depicted in FIG. 15C.Furthermore, by repeating the pad structure explained above capacitorswith polarity line symmetry, like those in FIGS. 15B and 15C, may beused so pad openings on the same pad may be grouped more closely,resulting in a higher density of decoupling capacitors attached to theseterminals. For example, pad openings in pads 1720, 1740, 1725 and 1726may accommodate terminals 1501-1504 of decoupling capacitor 1500 withthe terminal arrangement depicted in FIG. 15B.

Yet another type of decoupling capacitor which may be utilized with thenovel pad structures disclosed is depicted in FIG. 18A. Decouplingcapacitor 1800 may be an eight terminal decoupling capacitor like thatdepicted in FIG. 4, however decoupling capacitor may have terminals1801-1809 which do not alternate in polarity, as depicted in FIG. 18B,known as non-interdigitated capacitor.

FIG. 19 depicts one embodiment of a pad structure for use with this typeof decoupling capacitor 1800. Pad 1910 may have a positive polarity anda set of pad openings 1911, while pad 1920 may have negative polarityand a set of pad openings 1921. In one particular embodiment, anotherpad 1930 may have negative polarity and a set of pad openings 1931. Padopenings 1911, 1921, 1931 within pads 1910-1930 may be arranged in tworows with each pad opening in each row adjacent to another pad in thesame row and another pad opening in the other row.

Terminals 1801-1808 of decoupling capacitor 1800 may attach to padopenings in one row of pad openings in one pad and pad openings in onerow of pad openings in another pad with opposite polarity. For example,terminals 1801-1804 may attach to pad openings 1911 of positive pad 1910while terminals 1805-1808 may attach to pad openings 1921 of positivepad 1920. By virtue of having shared pads 1910-1930 pad openings 1911,1921 may be placed closer to one another allowing a higher density ofdecoupling capacitors 1800 to be attached to a substrate.

FIGS. 20A and 20B disclose other embodiments of a decoupling capacitor.Decoupling capacitor 2000 may have two terminals 2001, 2002. Terminals2001, 2002 may be utilized with a smaller decoupling capacitor 2000 asdepicted in FIG. 20A, or a larger decoupling capacitor 2000 as in FIG.20B. In one embodiment, the larger decoupling capacitor depicted in FIG.20B is an array of four decoupling capacitors whose like polarityterminals have been joined to make long terminals.

FIG. 21 depicts one embodiment of a pad structure for use withdecoupling capacitor 2000 in FIG. 20A. This pad structure issubstantially similar to that disclosed in FIG. 19, however thisembodiment may be used for coupling capacitors with only two terminals.Pad 2110 may have a positive polarity and at least two of pad openings2111, while pad 2120 may have negative polarity and at least two padopenings 2121. In one particular embodiment, another pad 2130 may havenegative polarity and at least two pad openings 2131. Pad openings 2111,2121, 2131 within pads 2110-2130 may be arranged in two rows with eachpad opening in each row adjacent to another pad in the same row andanother pad opening in the other row.

Terminals 2001, 2002 of decoupling capacitor 2000 may attach to padopenings in one row of pad openings in one pad and pad openings in onerow of pad openings in another pad with opposite polarity. For example,terminal 2002 may attach to pad openings 2111 of positive pad 2110 whileterminal 2001 may attach to pad openings 2121 of positive pad 2120. Byvirtue of having shared pads 2110-2130 pad openings 2111, 2121 may beplaced closer to one another allowing a higher density of decouplingcapacitors 2000 to be attached to a substrate, and multiple capacitorsmay share the pad openings of a single pad.

FIG. 22 depicts an embodiment of a similar pad structure, with openingsdesigned for use with decoupling capacitor 2000 of the type pictured inFIG. 20B. This pad structure is substantially similar to that disclosedin FIG. 21, however this embodiment may be utilized for couplingcapacitors with longer terminals. Pad 2210 may have a positive polarityand at least two of pad openings 2211, while pad 2220 may have negativepolarity and at least two pad openings 2221. In one particularembodiment, another pad 2230 may have negative polarity and at least twopad openings. Pad openings 2211, 2221, 2231 within pads 2210-2230 may bearranged in two rows with each pad opening in each row adjacent toanother pad in the same row and another pad opening in the other row.

Terminals 2001, 2002 of decoupling capacitor 2000 may attach to padopenings in one row of pad openings in one pad and pad openings in onerow of pad openings in another pad with opposite polarity. For example,terminal 2002 may attach to pad openings 2211 of positive pad 2210 whileterminal 2001 may attach to pad openings 2121 of positive pad 2220. Byvirtue of having shared pads 2210-2230 pad openings 2211, 2221 may beplaced closer to one another allowing a higher density of decouplingcapacitors 2000 to be attached to a substrate, and multiple capacitorsmay share the pad openings of a single pad.

It will be clear to those of ordinary skill in art that pad structuresof the type discussed may be tailored to utilize decoupling capacitorsor devices of any layout or construction including those with more orfewer terminals, differing layouts or arrangements or polarities ofterminals. A person of ordinary skill in the art will be capable ofdetermining which structure, arrangement, capacitor type etc. will bebest suited to a particular implementation.

In the foregoing specification, the invention has been described withreference to specific embodiments. However, various modifications andchanges can be made without departing from the scope of the invention asset forth in the claims below. Accordingly, the specification andfigures are to be regarded in an illustrative rather than a restrictivesense, and all such modifications are intended to be included within thescope of invention.

Benefits, other advantages, and solutions to problems have beendescribed above with regard to specific embodiments. However, thebenefits, advantages, solutions to problems, and any component(s) thatmay cause any benefit, advantage, or solution to occur or become morepronounced are not to be construed as a critical, required, or essentialfeature or component of any or all the claims.

1. A substrate layer for use with a semiconductor package, comprising: afirst pad with at least two pad openings; and a second pad with at leasttwo pad openings wherein the second pad has a polarity opposite thefirst pad.
 2. The substrate layer of claim 1, wherein each pad openingis operable to couple a terminal of a capacitor.
 3. The substrate layerof claim 2, wherein: the first pad and the second pad extend the lengthof the substrate layer; the first pad comprises a first row of padopenings and a second row of pad openings wherein the pad openings inthe first row are adjacent the pad openings in the second row; and thesecond pad comprises a first row of pad openings and a second row of padopenings wherein each pad opening in the first row of pad openings isadjacent a pad opening in the first row of pad openings in the first padand the second row of pad openings is adjacent the first row of padopenings.
 4. The substrate layer of claim 3, wherein the capacitor isnon-interdigitated.
 5. The substrate layer of claim 4, wherein: thecapacitor has at least two terminals; and a first terminal of thecapacitor is coupled to a first pad opening in the first pad and asecond terminal is coupled to a first pad opening in the second pad. 6.The substrate layer of claim 5, wherein: the capacitor has at leasteight terminals; a third terminal is coupled to a second pad opening inthe first pad; a fourth terminal is coupled to a third pad opening inthe first pad; a fifth terminal is coupled to a fourth pad opening inthe first pad; a sixth terminal is coupled to a second pad opening inthe second pad; a seventh terminal is coupled to a third pad opening inthe second pad; and a eighth terminal is coupled to a fourth pad openingin the second pad.
 7. The substrate layer of claim 2, comprising: a setof rows of pads, each row of pads comprising: a first pad having apolarity with four pad openings; a second pad with two pad openings anda polarity opposite the polarity of the first pad, wherein the secondpad is proximate the first pad; a third pad with two pad openings andthe same polarity as the polarity of the first pad, wherein the thirdpad is proximate the second pad; and a fourth pad with four pad openingsand a polarity opposite the polarity of the first pad, wherein thefourth pad is proximate the third pad.
 8. The substrate layer of claim7, wherein the rows of pads are adjacent to each other such that eachpad within a row is aligned with a corresponding pad in each adjacentrow, and the corresponding pad in each adjacent row has an oppositepolarity.
 9. The substrate layer of claim 8 further comprising a firstinderdigitated capacitor, having at least eight terminals wherein afirst terminal connects to a first pad opening of the first pad of thefirst row; a second terminal proximate the first terminal and with apolarity opposite the first terminal is coupled to a first pad openingof the second pad of the first row; a third terminal proximate thesecond terminal and with a polarity opposite the second terminal iscoupled to a first pad opening of the third pad of the first row; afourth terminal proximate the third terminal and with a polarityopposite the first terminal is coupled to a first pad opening of thefourth pad of the first row; a fifth terminal proximate the fourthterminal and with a polarity opposite the fourth terminal is coupled toa first pad opening of the fourth pad of the second row; a sixthterminal proximate the fifth terminal and with a polarity opposite thefifth terminal is coupled to a first pad opening of the third pad of thesecond row; a seventh terminal proximate the sixth terminal and with apolarity opposite the sixth terminal is coupled to a first pad openingof the second pad of the second row; and an eighth terminal proximatethe seventh terminal and with a polarity opposite the seventh terminalis coupled to a first pad opening of the first pad of the second row.10. The substrate layer of claim 9, wherein each row further comprisinga set of rows of pads, each row of pads comprising: a fifth pad with twopad openings and a polarity opposite the polarity of the fourth pad,wherein the fifth pad is proximate the fourth pad; a sixth pad with twopad openings and the same polarity as the polarity of the fourth pad,wherein the sixth pad is proximate the fifth pad; and a seventh pad withfour pad openings and a polarity opposite the polarity of the sixth pad,wherein the seventh pad is proximate the sixth pad.
 11. The substratelayer of claim 10 further comprising a second interdigitated capacitor,having at least eight terminals and point symmetry to the firstcapacitor wherein a first terminal of the second capacitor is coupled toa second pad opening of the fourth pad of the first row; a secondterminal of the second capacitor proximate the first terminal of thesecond capacitor and with a polarity opposite the first terminal of thesecond capacitor is coupled to a first pad opening of the fifth pad ofthe first row; a third terminal of the second capacitor proximate thesecond terminal of the second capacitor and with a polarity opposite thesecond terminal of the second capacitor is coupled to a first padopening of the sixth pad of the first row; a fourth terminal of thesecond capacitor proximate the third terminal of the second capacitorand with a polarity opposite the first terminal of the second capacitoris coupled to a first pad opening of the seventh pad of the first row; afifth terminal of the second capacitor proximate the fourth terminal ofthe second capacitor and with a polarity opposite the fourth terminal ofthe second capacitor is coupled to a first pad opening of the seventhpad of the second row; a sixth terminal of the second capacitorproximate the fifth terminal of the second capacitor and with a polarityopposite the fifth terminal of the second capacitor is coupled to afirst pad opening of the sixth pad of the second row; a seventh terminalof the second capacitor proximate the sixth terminal of the secondcapacitor and with a polarity opposite the sixth terminal is coupled toa first pad opening of the fifth pad of the second row; and an eighthterminal of the second capacitor proximate the seventh terminal of thesecond capacitor and with a polarity opposite the seventh terminal ofthe second capacitor is coupled to a second pad opening of the fourthpad of the second row.
 12. The substrate layer of claim 2, comprising: afirst row of pads adjacent the first pad, wherein the first row of pads,comprises: a two pad opening pad having a polarity opposite the secondpad; and a multiple pad opening pad having a polarity opposite the twopad opening pad of the first row, wherein the two pad opening pad of thefirst row is contained within, but not touching the multiple pad openingpad of the first row; and a second row of pads adjacent the second pad,wherein the second row of pad comprises: a two pad opening pad having apolarity opposite the first pad; and a multiple pad opening pad having apolarity opposite the two pad opening pad of the second row, wherein thetwo pad opening pad of the second row is contained within, but nottouching the multiple pad opening pad of the second row; and wherein thefirst pad comprises at least two pad openings wherein the pad openingsare formed linearly along the pad and the second pad is adjacent to thefirst pad, has a polarity opposite the first pad and comprises at leasttwo pad openings formed linearly along the pad such that each padopening is adjacent to a pad opening of the first pad.
 13. The substratelayer of claim 12 further comprising a first interdigitated capacitor,having at least ten terminals wherein a first terminal is coupled to afirst pad opening of the two opening pad of the first row of pads; asecond terminal proximate the first terminal and with a polarityopposite the first terminal is coupled to a first pad opening of themultiple opening pad of the first row of pads; a third terminalproximate the second terminal and with a polarity opposite the secondterminal is coupled to a first pad opening of the first pad; a fourthterminal proximate the third terminal and with a polarity opposite thethird terminal is coupled to a first pad opening of the second pad; afifth terminal proximate the fourth terminal and with a polarityopposite the fourth terminal is coupled to a first pad opening of themultiple pad opening pad of the second row of pads; a sixth terminalproximate the fifth terminal and with a polarity opposite the fifthterminal is coupled to a first pad opening of the two opening pad of thefirst row of pads; a seventh terminal proximate the sixth terminal andwith a polarity opposite the sixth terminal is coupled to a second padopening of the multiple opening pad of the second row of pads; an eighthterminal proximate the seventh terminal and with a polarity opposite theseventh terminal is coupled to a second pad opening of the second pad; aninth terminal proximate the eighth terminal and with a polarityopposite the eighth terminal is coupled to a second pad opening of thefirst pad; a tenth terminal proximate the ninth terminal and with apolarity opposite the ninth terminal is coupled to a second pad openingof the multiple opening pad of the first row of pads.
 14. The substratelayer of claim 13, comprising a third pad having a polarity opposite thefirst pad, comprising at least two pad openings wherein the pad openingsare formed linearly along the pad; a fourth pad adjacent to the thirdpad, having a polarity opposite the third pad and comprising at leasttwo pad openings wherein the at least two pad openings are formedlinearly along the pad and each pad opening is adjacent to a pad openingof the first pad; a third row of pads adjacent the fourth pad, whereinthe third row of pads, comprises: a two pad opening pad having apolarity opposite the third pad; and a multiple pad opening pad having apolarity opposite the two pad opening pad of the first row wherein thetwo pad opening pad of the first row is contained within, but nottouching the multiple pad opening pad of the first row.
 15. Thesubstrate layer of claim 14, further comprising a second interdigitatedcapacitor, having point symmetry to the first alternating capacitor andat least ten terminals wherein a first terminal of the second capacitoris coupled to a second pad opening of the two opening pad of the secondrow of pads; a second terminal of the second capacitor proximate thefirst terminal of the second capacitor and with a polarity opposite thefirst terminal is coupled to a third pad opening of the multiple openingpad of the first row of pads; a third terminal of the second capacitorproximate the second terminal and with a polarity opposite the secondterminal of the second capacitor is coupled to a first pad opening ofthe third pad; a fourth terminal of the second capacitor proximate thethird terminal of the second capacitor and with a polarity opposite thethird terminal of the second capacitor is coupled to a first pad openingof the fourth pad; a fifth terminal of the second capacitor proximatethe fourth terminal of the second capacitor and with a polarity oppositethe fourth terminal is coupled to a first pad opening of the multiplepad opening pad of the third row of pads; a sixth terminal of the secondcapacitor proximate the fifth terminal of the second capacitor and witha polarity opposite the fifth terminal of the second capacitor iscoupled to a first pad opening of the two opening pad of the third rowof pads; a seventh terminal of the second capacitor proximate the sixthterminal of the second capacitor and with a polarity opposite the sixthterminal of the second capacitor is coupled to a second pad opening ofthe multiple opening pad of the third row of pads; an eighth terminal ofthe second capacitor proximate the seventh terminal of the secondcapacitor and with a polarity opposite the seventh terminal of thesecond capacitor is coupled to a second pad opening of the fourth pad; aninth terminal of the second capacitor proximate the eighth terminal ofthe second capacitor and with a polarity opposite the eighth terminal ofthe second capacitor is coupled to a second pad opening of the thirdpad; a tenth terminal of the second capacitor proximate the ninthterminal of the second capacitor and with a polarity opposite the ninthterminal of the second capacitor is coupled to a fourth pad opening ofthe multiple opening pad of the second row of pads.
 16. The substratelayer of claim 2, comprising a first pad comprising at least two padopenings wherein the pad openings are formed linearly along the pad; asecond pad adjacent to the first pad, having a polarity opposite thefirst pad and comprising at least two pad openings wherein the at leasttwo pad openings are formed linearly along the pad and each pad openingis adjacent to a pad opening of the first pad; a third pad adjacent tothe second pad, having a polarity opposite the second pad and comprisingat least two pad openings wherein the at least two pad openings areformed linearly along the pad and each pad opening is adjacent to a padopening of the second pad; a fourth pad adjacent to the first pad,having a polarity opposite the third pad and comprising at least two padopenings wherein the at least two pad openings are formed linearly alongthe pad and each pad opening is adjacent to a pad opening of the thirdpad; a fifth pad, adjacent to the first pad, having a polarity oppositethe first pad and comprising at least two pad openings wherein the atleast two pad openings are formed linearly along the pad and disposedbetween the pad openings of the first row; and. a sixth pad, adjacent tothe fourth pad, having a polarity opposite the fourth pad and comprisingat least two pad openings wherein the at least two pad openings areformed linearly along the pad and disposed between the pad openings ofthe fourth row.
 17. The layer of claim 16, further comprising a firstinterdigitated capacitor, having at least ten terminals wherein a firstterminal is coupled to a first pad opening of the fifth pad; a secondterminal proximate the first terminal and with a polarity opposite thefirst terminal is coupled to a first pad opening of the first pad; athird terminal proximate the second terminal and with a polarityopposite the second terminal is coupled to a first pad opening of thesecond pad; a fourth terminal proximate the third terminal and with apolarity opposite the third terminal is coupled to a first pad openingof the third pad; a fifth terminal proximate the fourth terminal andwith a polarity opposite the fourth terminal is coupled to a first padopening of the fourth pad; a sixth terminal proximate the fifth terminaland with a polarity opposite the fifth terminal is coupled to a firstpad opening of the sixth pad; a seventh terminal proximate the sixthterminal and with a polarity opposite the sixth terminal is coupled to asecond pad opening of the fourth pad; a eighth terminal proximate theseventh terminal and with a polarity opposite the seventh terminal iscoupled to a second pad opening of the third pad; a ninth terminalproximate the eighth terminal and with a polarity opposite the eighthterminal is coupled to a second pad opening of the second pad; a tenthterminal proximate the ninth terminal and with a polarity opposite theninth terminal is coupled to a second pad opening of the first pad. 18.The substrate layer of claim 17, further comprising a seventh padadjacent to the sixth pad, having a polarity opposite the sixth pad andcomprising at least two pad openings wherein the at least two padopenings are formed linearly along the pad and each pad opening isadjacent to a pad opening of the fourth pad; an eighth pad adjacent tothe seventh pad, having a polarity opposite the seventh pad andcomprising at least two pad openings wherein the at least two padopenings are formed linearly along the pad and each pad opening isadjacent to a pad opening of the seventh pad; a ninth pad adjacent tothe eighth pad, having a polarity opposite the eighth pad and comprisingat least two pad openings wherein the at least two pad openings areformed linearly along the pad and each pad opening is adjacent to a padopening of the eighth pad; a tenth pad adjacent to the ninth pad, havinga polarity opposite the ninth pad and comprising at least two padopenings wherein the at least two pad openings are formed linearly alongthe pad and each pad opening is adjacent to a pad opening of the ninthpad; and an eleventh pad, adjacent to the tenth pad, having a polarityopposite the tenth pad and comprising at least two pad openings whereinthe at least two pad openings are formed linearly along the pad anddisposed between the pad openings of the first row.
 19. The substratelayer of claim 18, further comprising a second interdigitated capacitor,having at least ten terminals wherein a first terminal of the secondcapacitor is coupled to a second pad opening of the sixth pad; a secondterminal of the second capacitor proximate the first terminal of thesecond capacitor and with a polarity opposite the first terminal of thesecond capacitor is coupled to a first pad opening of the seventh pad; athird terminal of the second capacitor proximate the second terminal ofthe second capacitor and with a polarity opposite the second terminal ofthe second capacitor is coupled to a first pad opening of the eighthpad; a fourth terminal of the second capacitor proximate the thirdterminal of the second capacitor and with a polarity opposite the thirdterminal of the second capacitor is coupled to a first pad opening ofthe ninth pad; a fifth terminal of the second capacitor proximate thefourth terminal of the second capacitor and with a polarity opposite thefourth terminal of the second capacitor is coupled to a first padopening of the tenth pad; a sixth terminal of the second capacitorproximate the fifth terminal a of the second capacitor and with apolarity opposite the fifth terminal of the second capacitor is coupledto a first pad opening of the eleventh pad; a seventh terminal of thesecond capacitor proximate the sixth terminal of the second capacitorand with a polarity opposite the sixth terminal of the second capacitoris coupled to a second pad opening of the tenth pad; an eighth terminalof the second capacitor proximate the seventh terminal of the secondcapacitor and with a polarity opposite the seventh terminal of thesecond capacitor is coupled to a second pad opening of the ninth pad; aninth terminal of the second capacitor proximate the eighth terminal ofthe second capacitor and with a polarity opposite the eighth terminal ofthe second capacitor is coupled to a second pad opening of the eighthpad; and a tenth terminal of the second capacitor proximate the ninthterminal of the second capacitor and with a polarity opposite the ninthterminal is coupled to a second pad opening of the seventh pad.
 20. Thesubstrate layer of claim 2, comprising a first square pad comprisingfour pad openings disposed near the corners of the first square pad; asecond square pad having polarity opposite the first square pad,comprising four pad openings disposed near the corners of the secondsquare pad; a third square pad having polarity opposite the secondsquare pad comprising four pad openings disposed near the corners of thethird square pad; a fourth square pad having a polarity opposite thefirst square pad comprising four pad openings disposed near the cornersof the first square pad; a first rectangular pad proximate the firstsquare pad comprising two pad openings at each end of the firstrectangular pad and having a polarity opposite the first square pad; asecond rectangular pad proximate the first rectangular pad and distalthe first square pad, the second rectangular pad comprising two padopenings at each end, and having a polarity opposite the firstrectangular pad; a third rectangular pad proximate the second square padcomprising two pad openings at each end and having a polarity oppositethe second square pad; a fourth rectangular pad proximate the thirdrectangular pad and distal the second square pad, the fourth rectangularpad comprising two pad openings at each end, and having a polarityopposite the third rectangular pad; a fifth rectangular pad proximatethe third square pad comprising two pad openings at each end and havinga polarity opposite the third square pad; a sixth rectangular padproximate the fifth rectangular pad and distal the third square pad, thesixth rectangular pad comprising two pad openings at each end, andhaving a polarity opposite the fifth rectangular pad; a seventhrectangular pad proximate the fourth square pad comprising two padopenings at each end, and having a polarity opposite the fourth squarepad; an eighth rectangular pad proximate the seventh rectangular pad anddistal the fourth square pad, the eighth rectangular pad comprising twopad openings at each end, and having a polarity opposite the seventhrectangular pad; a first circular pad proximate to the first square padcomprising a pad opening and having the same polarity as the firstsquare pad; a second circular pad proximate to the second square padcomprising a pad opening and having the same polarity as the secondsquare pad; a third circular pad proximate to the third square padcomprising a pad opening and having the same polarity as the thirdsquare pad; and a fourth circular pad proximate to the fourth square padcomprising a pad opening and having the same polarity as the fourthsquare pad.
 21. The substrate layer of claim 20, further comprising afirst interdigitated capacitor, having at least sixteen terminalswherein a first terminal is coupled to a first pad opening of the firstrectangular pad; a second terminal proximate the first terminal and witha polarity opposite the first terminal is coupled to a first pad openingof the first rectangular pad; a third terminal proximate the secondterminal and with a polarity opposite the second terminal is coupled toa first pad opening of the second rectangular pad; a fourth terminalproximate the third terminal and with a polarity opposite the thirdterminal is coupled to a first pad opening of the second square pad; afifth terminal proximate the fourth terminal and with a polarityopposite the fourth terminal is coupled to a first pad opening of thethird rectangular pad; a sixth terminal proximate the fifth terminal andwith a polarity opposite the fifth terminal is coupled to a first padopening of the fourth rectangular pad; a seventh terminal proximate thesixth terminal and with a polarity opposite the sixth terminal iscoupled to a first pad opening of the third square pad; an eighthterminal proximate the seventh terminal and with a polarity opposite theseventh terminal is coupled to a first pad opening of the fifthrectangular pad; a ninth terminal proximate the eighth terminal and witha polarity opposite the eighth terminal is coupled to a first padopening of the sixth rectangular pad; a tenth terminal proximate theninth terminal and with a polarity opposite the ninth terminal iscoupled to a first pad opening of the fourth square pad; a eleventhterminal proximate the tenth terminal and with a polarity opposite thetenth terminal is coupled to a first pad opening of the seventhrectangular pad; a twelfth terminal proximate the eleventh terminal andwith a polarity opposite the eleventh terminal is coupled to a first padopening of the eighth rectangular pad; a thirteenth terminal proximatethe twelfth terminal and with a polarity opposite the twelfth terminalis coupled to a first pad opening of the first circular pad; afourteenth terminal proximate the thirteenth terminal and with apolarity opposite the thirteenth terminal is coupled to a first padopening of the second circular pad; a fifteenth terminal proximate thefourteenth terminal and with a polarity opposite the fourteenth terminalis coupled to a first pad opening of the third circular pad; a sixteenthterminal proximate the fifteenth terminal and with a polarity oppositethe fifteenth terminal is coupled to a first pad opening of the fourthcircular pad.
 22. The substrate layer of claim 21, further comprising: afifth square pad having polarity opposite the third square pad,comprising four pad openings disposed near the corners of the firstsquare pad; a sixth square pad having polarity opposite the fifth squarepad, comprising four pad openings disposed near the corners of thesecond square pad; a ninth rectangular pad proximate the third squarepad comprising two pad openings at each end and having a polarityopposite the third square pad; a tenth rectangular pad proximate theninth rectangular pad and distal the third square pad, the tenthrectangular pad comprising two pad openings at each end, and having apolarity opposite the ninth rectangular pad; an eleventh rectangular padproximate the fifth square pad comprising two pad openings at each endand having a polarity opposite the fifth square pad; a twelfthrectangular pad proximate the eleventh rectangular pad and distal thefifth square pad, the twelfth rectangular pad comprising two padopenings at each end, and having a polarity opposite the eleventhrectangular pad; a thirteenth rectangular pad proximate the sixth squarepad comprising two pad openings at each end and having a polarityopposite the sixth square pad; a fourteenth rectangular pad proximatethe thirteenth rectangular pad and distal the sixth square pad, thefourteenth rectangular pad comprising two pad openings at each end, andhaving a polarity opposite the thirteenth rectangular pad; a fifthcircular pad proximate to the fourth square pad comprising a pad openingand having the same polarity as the fourth square pad; a sixth circularpad proximate to the third square pad comprising a pad opening andhaving the same polarity as the third square pad; a seventh circular padproximate to the fifth square pad comprising a pad opening and havingthe same polarity as the fifth square pad; and an eighth circular padproximate to the sixth square pad comprising a pad opening and havingthe same polarity as the sixth square pad.
 23. The substrate layer ofclaim 22, further comprising a second interdigitated capacitor, havingat least sixteen terminals wherein a first terminal of the secondcapacitor is coupled to a second pad opening of the fourth rectangularpad; a second terminal of the second capacitor proximate the firstterminal of the second capacitor and with a polarity opposite the firstterminal is coupled to a second pad opening of the sixth rectangularpad; a third terminal of the second capacitor proximate the secondterminal of the second capacitor and with a polarity opposite the secondterminal of the second capacitor is coupled to a second pad opening ofthe fifth rectangular pad; a fourth terminal of the second capacitorproximate the third terminal of the second capacitor and with a polarityopposite the third terminal of the second capacitor is coupled to asecond pad opening of the third square pad; a fifth terminal of thesecond capacitor proximate the fourth terminal of the second capacitorand with a polarity opposite the fourth terminal of the second capacitoris coupled to a first pad opening of the ninth rectangular pad; a sixthterminal of the second capacitor proximate the fifth terminal of thesecond capacitor and with a polarity opposite the fifth terminal of thesecond capacitor is coupled to a first pad opening of the tenthrectangular pad; a seventh terminal proximate the sixth terminal of thesecond capacitor and with a polarity opposite the sixth terminal of thesecond capacitor is coupled to a first pad opening of the fifth squarepad; an eighth terminal of the second capacitor proximate the seventhterminal of the second capacitor and with a polarity opposite theseventh terminal of the second capacitor is coupled to a first padopening of the eleventh rectangular pad; a ninth terminal of the secondcapacitor proximate the eighth terminal of the second capacitor and witha polarity opposite the eighth terminal of the second capacitor iscoupled to a first pad opening of the twelfth rectangular pad; a tenthterminal of the second capacitor proximate the ninth terminal of thesecond capacitor and with a polarity opposite the ninth terminal of thesecond capacitor is coupled to a first pad opening of the sixth squarepad; an eleventh terminal of the second capacitor proximate the tenthterminal of the second capacitor and with a polarity opposite the tenthterminal of the second capacitor is coupled to a first pad opening ofthe thirteenth rectangular pad; a twelfth terminal of the secondcapacitor proximate the eleventh terminal and with a polarity oppositethe eleventh terminal of the second capacitor is coupled to a first padopening of the fourteenth rectangular pad; a thirteenth terminal of thesecond capacitor proximate the twelfth terminal of the second capacitorand with a polarity opposite the twelfth terminal of the secondcapacitor is coupled to a first pad opening of the fifth circular pad; afourteenth terminal of the second capacitor proximate the thirteenthterminal of the second capacitor and with a polarity opposite thethirteenth terminal of the second capacitor is coupled to a first padopening of the sixth circular pad; a fifteenth terminal of the secondcapacitor proximate the fourteenth terminal of the second capacitor andwith a polarity opposite the fourteenth terminal of the second capacitoris coupled to a first pad opening of the seventh circular pad; and asixteenth terminal of the second capacitor proximate the fifteenthterminal of the second capacitor and with a polarity opposite thefifteenth terminal of the second capacitor is coupled to a first padopening of the eighth circular pad.
 24. A method for forming a substratelayer for use with a semiconductor package, comprising: forming a firstpad with at least two pad openings; and forming a second pad with atleast two pad openings wherein the second pad has a polarity oppositethe first pad.
 25. The substrate layer of claim 24, wherein each padopening is operable to couple a terminal of a capacitor.
 26. The methodof claim 25, wherein the first pad and the second pad extend the lengthof the substrate layer; the first pad comprises a first row of padopenings and a second row of pad openings wherein the pad openings inthe first row are adjacent the pad openings in the second row; and thesecond pad comprises a first row of pad openings and a second row of padopenings wherein each pad opening in the first row of pad openings isadjacent a pad opening in the first row of pad openings in the first padand the second row of pad openings is adjacent the first row of padopenings.
 27. The method of claim 26, wherein the capacitor isnon-interdigitated.
 28. The method of claim 27, wherein the capacitorhas at least two terminals, further comprising coupling a first terminalof the capacitor to a first pad opening in the first pad and coupling asecond terminal to a first pad opening in the second pad.
 29. The methodof claim 28, wherein the capacitor has at least eight terminals, and themethod further comprises coupling a third terminal to a second padopening in the first pad; coupling a fourth terminal to a third padopening in the first pad; coupling a fifth terminal to a fourth padopening in the first pad; coupling a sixth terminal to a second padopening in the second pad; coupling a seventh terminal to a third padopening in the second pad; and coupling a eighth terminal to a fourthpad opening in the second pad.
 30. The method of claim 25, comprising:forming a set of rows of pads, each row of pads comprising: a first padhaving a polarity with four pad openings; a second pad with two padopenings and a polarity opposite the polarity of the first pad, whereinthe second pad is proximate the first pad; a third pad with two padopenings and the same polarity as the polarity of the first pad, whereinthe third pad is proximate the second pad; and a fourth pad with fourpad openings and a polarity opposite the polarity of the first pad,wherein the fourth pad is proximate the third pad.
 31. The method ofclaim 30, wherein the rows of pads are adjacent to each other such thateach pad within a row is aligned with a corresponding pad in eachadjacent row, and the corresponding pad in each adjacent row has anopposite polarity.
 32. The method of claim 31, further comprisingcoupling a first inderdigitated capacitor, having at least eightterminals to the substrate layer wherein a first terminal is coupled toa first pad opening of the first pad of the first row; a second terminalproximate the first terminal and with a polarity opposite the firstterminal is coupled to a first pad opening of the second pad of thefirst row; a third terminal proximate the second terminal and with apolarity opposite the second terminal is coupled to a first pad openingof the third pad of the first row; a fourth terminal proximate the thirdterminal and with a polarity opposite the first terminal is coupled to afirst pad opening of the fourth pad of the first row; a fifth terminalproximate the fourth terminal and with a polarity opposite the fourthterminal is coupled to a first pad opening of the fourth pad of thesecond row; a sixth terminal proximate the fifth terminal and with apolarity opposite the fifth terminal is coupled to a first pad openingof the third pad of the second row; a seventh terminal proximate thesixth terminal and with a polarity opposite the sixth terminal iscoupled to a first pad opening of the second pad of the second row; andan eighth terminal proximate the seventh terminal and with a polarityopposite the seventh terminal is coupled to a first pad opening of thefirst pad of the second row.
 33. The method of claim 32, wherein eachrow further comprises a set of rows of pads, each row of padscomprising: a fifth pad with two pad openings and a polarity oppositethe polarity of the fourth pad, wherein the fifth pad is proximate thefourth pad; a sixth pad with two pad openings and the same polarity asthe polarity of the fourth pad, wherein the sixth pad is proximate thefifth pad; and a seventh pad with four pad openings and a polarityopposite the polarity of the sixth pad, wherein the seventh pad isproximate the sixth pad.
 34. The method of claim 33, further comprisingcoupling a second interdigitated capacitor, having at least eightterminals and point symmetry to the first capacitor wherein a firstterminal of the second capacitor is coupled to a second pad opening ofthe fourth pad of the first row; a second terminal of the secondcapacitor proximate the first terminal of the second capacitor and witha polarity opposite the first terminal of the second capacitor iscoupled to a first pad opening of the fifth pad of the first row; athird terminal of the second capacitor proximate the second terminal ofthe second capacitor and with a polarity opposite the second terminal ofthe second capacitor is coupled to a first pad opening of the sixth padof the first row; a fourth terminal of the second capacitor proximatethe third terminal of the second capacitor and with a polarity oppositethe first terminal of the second capacitor is coupled to a first padopening of the seventh pad of the first row; a fifth terminal of thesecond capacitor proximate the fourth terminal of the second capacitorand with a polarity opposite the fourth terminal of the second capacitoris coupled to a first pad opening of the seventh pad of the second row;a sixth terminal of the second capacitor proximate the fifth terminal ofthe second capacitor and with a polarity opposite the fifth terminal ofthe second capacitor is coupled to a first pad opening of the sixth padof the second row; a seventh terminal of the second capacitor proximatethe sixth terminal of the second capacitor and with a polarity oppositethe sixth terminal is coupled to a first pad opening of the fifth pad ofthe second row; and an eighth terminal of the second capacitor proximatethe seventh terminal of the second capacitor and with a polarityopposite the seventh terminal of the second capacitor is coupled to asecond pad opening of the fourth pad of the second row.
 35. The methodof claim 25, further comprising: forming a first row of pads adjacentthe first pad, wherein the first row of pads, comprises: a two padopening pad having a polarity opposite the second pad; and a multiplepad opening pad having a polarity opposite the two pad opening pad ofthe first row, wherein the two pad opening pad of the first row iscontained within, but not touching the multiple pad opening pad of thefirst row; and forming a second row of pads adjacent the second pad,wherein the second row of pad comprises: a two pad opening pad having apolarity opposite the first pad; and a multiple pad opening pad having apolarity opposite the two pad opening pad of the second row, wherein thetwo pad opening pad of the second row is contained within, but nottouching the multiple pad opening pad of the second row; and wherein thefirst pad comprises at least two pad openings wherein the pad openingsare formed linearly along the pad and the second pad is adjacent to thefirst pad, has a polarity opposite the first pad and comprises at leasttwo pad openings formed linearly along the pad such that each padopening is adjacent to a pad opening of the first pad.
 36. The method ofclaim 35, further comprising coupling a first interdigitated capacitor,having at least ten terminals to the substrate layer wherein a firstterminal is coupled to a first pad opening of the two opening pad of thefirst row of pads; a second terminal proximate the first terminal andwith a polarity opposite the first terminal is coupled to a first padopening of the multiple opening pad of the first row of pads; a thirdterminal proximate the second terminal and with a polarity opposite thesecond terminal is coupled to a first pad opening of the first pad; afourth terminal proximate the third terminal and with a polarityopposite the third terminal is coupled to a first pad opening of thesecond pad; a fifth terminal proximate the fourth terminal and with apolarity opposite-the fourth terminal is coupled to a first pad openingof the multiple pad opening pad of the second row of pads; a sixthterminal proximate the fifth terminal and with a polarity opposite thefifth terminal is coupled to a first pad opening of the two opening padof the first row of pads; a seventh terminal proximate the sixthterminal and with a polarity opposite the sixth terminal is coupled to asecond pad opening of the multiple opening pad of the second row ofpads; an eighth terminal proximate the seventh terminal and with apolarity opposite the seventh terminal is coupled to a second padopening of the second pad; a ninth terminal proximate the eighthterminal and with a polarity opposite the eighth terminal is coupled toa second pad opening of the first pad; a tenth terminal proximate theninth terminal and with a polarity opposite the ninth terminal iscoupled to a second pad opening of the multiple opening pad of the firstrow of pads.
 37. The method of claim 36, further comprising forming athird pad having a polarity opposite the first pad, comprising at leasttwo pad openings wherein the pad openings are formed linearly along thepad; forming a fourth pad adjacent to the third pad, having a polarityopposite the third pad and comprising at least two pad openings whereinthe at least two pad openings are formed linearly along the pad and eachpad opening is adjacent to a pad opening of the first pad; forming athird row of pads adjacent the fourth pad, wherein the third row ofpads, comprises: a two pad opening pad having a polarity opposite thethird pad; and a multiple pad opening pad having a polarity opposite thetwo pad opening pad of the first row wherein the two pad opening pad ofthe first row is contained within, but not touching the multiple padopening pad of the first row.
 38. The method of claim 37, furthercomprising coupling a second interdigitated capacitor having pointsymmetry to the first alternating capacitor and at least ten terminalsto the substrate layer wherein a first terminal of the second capacitoris coupled to a second pad opening of the two opening pad of the secondrow of pads; a second terminal of the second capacitor proximate thefirst terminal of the second capacitor and with a polarity opposite thefirst terminal is coupled to a third pad opening of the multiple openingpad of the first row of pads; a third terminal of the second capacitorproximate the second terminal and with a polarity opposite the secondterminal of the second capacitor is coupled to a first pad opening ofthe third pad; a fourth terminal of the second capacitor proximate thethird terminal of the second capacitor and with a polarity opposite thethird terminal of the second capacitor is coupled to a first pad openingof the fourth pad; a fifth terminal of the second capacitor proximatethe fourth terminal of the second capacitor and with a polarity oppositethe fourth terminal is coupled to a first pad opening of the multiplepad opening pad of the third row of pads; a sixth terminal of the secondcapacitor proximate the fifth terminal of the second capacitor and witha polarity opposite the fifth terminal of the second capacitor iscoupled to a first pad opening of the two opening pad of the third rowof pads; a seventh terminal of the second capacitor proximate the sixthterminal of the second capacitor and with a polarity opposite the sixthterminal of the second capacitor is coupled to a second pad opening ofthe multiple opening pad of the third row of pads; an eighth terminal ofthe second capacitor proximate the seventh terminal of the secondcapacitor and with a polarity opposite the seventh terminal of thesecond capacitor is coupled to a second pad opening of the fourth pad; aninth terminal of the second capacitor proximate the eighth terminal ofthe second capacitor and with a polarity opposite the eighth terminal ofthe second capacitor is coupled to a second pad opening of the thirdpad; a tenth terminal of the second capacitor proximate the ninthterminal of the second capacitor and with a polarity opposite the ninthterminal of the second capacitor is coupled to a fourth pad opening ofthe multiple opening pad of the second row of pads.
 39. The method ofclaim 25, further comprising forming a first pad comprising at least twopad openings wherein the pad openings are formed linearly along the pad;forming a second pad adjacent to the first pad, having a polarityopposite the first pad and comprising at least two pad openings whereinthe at least two pad openings are formed linearly along the pad and eachpad opening is adjacent to a pad opening of the first pad; forming athird pad adjacent to the second pad, having a polarity opposite thesecond pad and comprising at least two pad openings wherein the at leasttwo pad openings are formed linearly along the pad and each pad openingis adjacent to a pad opening of the second pad; forming a fourth padadjacent to the first pad, having a polarity opposite the third pad andcomprising at least two pad openings wherein the at least two padopenings are formed linearly along the pad and each pad opening isadjacent to a pad opening of the third pad; forming a fifth pad,adjacent to the first pad, having a polarity opposite the first pad andcomprising at least two pad openings wherein the at least two padopenings are formed linearly along the pad and disposed between the padopenings of the first row; and forming a sixth pad, adjacent to thefourth pad, having a polarity opposite the fourth pad and comprising atleast two pad openings wherein the at least two pad openings are formedlinearly along the pad and disposed between the pad openings of thefourth row.
 40. The layer of claim 39, further comprising coupling afirst interdigitated capacitor, having at least ten terminals to thesubstrate layer wherein a first terminal is coupled to a first padopening of the fifth pad; a second terminal proximate the first terminaland with a polarity opposite the first terminal is coupled to a firstpad opening of the first pad; a third terminal proximate the secondterminal and with a polarity opposite the second terminal is coupled toa first pad opening of the second pad; a fourth terminal proximate thethird terminal and with a polarity opposite the third terminal iscoupled to a first pad opening of the third pad; a fifth terminalproximate the fourth terminal and with a polarity opposite the fourthterminal is coupled to a first pad opening of the fourth pad; a sixthterminal proximate the fifth terminal and with a polarity opposite thefifth terminal is coupled to a first pad opening of the sixth pad; aseventh terminal proximate the sixth terminal and with a polarityopposite the sixth terminal is coupled to a second pad opening of thefourth pad; a eighth terminal proximate the seventh terminal and with apolarity opposite the seventh terminal is coupled to a second padopening of the third pad; a ninth terminal proximate the eighth terminaland with a polarity opposite the eighth terminal is coupled to a secondpad opening of the second pad; a tenth terminal proximate the ninthterminal and with a polarity opposite the ninth terminal is coupled to asecond pad opening of the first pad.
 41. The method of claim 40, furthercomprising forming a seventh pad adjacent to the sixth pad, having apolarity opposite the sixth pad and comprising at least two pad openingswherein the at least two pad openings are formed linearly along the padand each pad opening is adjacent to a pad opening of the fourth pad;forming an eighth pad adjacent to the seventh pad, having a polarityopposite the seventh pad and comprising at least two pad openingswherein the at least two pad openings are formed linearly along the padand each pad opening is adjacent to a pad opening of the seventh pad;forming a ninth pad adjacent to the eighth pad, having a polarityopposite the eighth pad and comprising at least two pad openings whereinthe at least two pad openings are formed linearly along the pad and eachpad opening is adjacent to a pad opening of the eighth pad; forming atenth pad adjacent to the ninth pad, having a polarity opposite theninth pad and comprising at least two pad openings wherein the at leasttwo pad openings are formed linearly along the pad and each pad openingis adjacent to a pad opening of the ninth pad; and forming an eleventhpad, adjacent to the tenth pad, having a polarity opposite the tenth padand comprising at least two pad openings wherein the at least two padopenings are formed linearly along the pad and disposed between the padopenings of the first row.
 42. The method of claim 41, furthercomprising coupling a second interdigitated capacitor, having at leastten terminals to the substrate layer wherein a first terminal of thesecond capacitor is coupled to a second pad opening of the sixth pad; asecond terminal of the second capacitor proximate the first terminal ofthe second capacitor and with a polarity opposite the first terminal ofthe second capacitor is coupled to a first pad opening of the seventhpad; a third terminal of the second capacitor proximate the secondterminal of the second capacitor and with a polarity opposite the secondterminal of the second capacitor is coupled to a first pad opening ofthe eighth pad; a fourth terminal of the second capacitor proximate thethird terminal of the second capacitor and with a polarity opposite thethird terminal of the second capacitor is coupled to a first pad openingof the ninth pad; a fifth terminal of the second capacitor proximate thefourth terminal of the second capacitor and with a polarity opposite thefourth terminal of the second capacitor is coupled to a first padopening of the tenth pad; a sixth terminal of the second capacitorproximate the fifth terminal a of the second capacitor and with apolarity opposite the fifth terminal of the second capacitor is coupledto a first pad opening of the eleventh pad; a seventh terminal of thesecond capacitor proximate the sixth terminal of the second capacitorand with a polarity opposite the sixth terminal of the second capacitoris coupled to a second pad opening of the tenth pad; a eighth terminalof the second capacitor proximate the seventh terminal of the secondcapacitor and with a polarity opposite the seventh terminal of thesecond capacitor is coupled to a second pad opening of the ninth pad; aninth terminal of the second capacitor proximate the eighth terminal ofthe second capacitor and with a polarity opposite the eighth terminal ofthe second capacitor is coupled to a second pad opening of the eighthpad; and a tenth terminal of the second capacitor proximate the ninthterminal of the second capacitor and with a polarity opposite the ninthterminal is coupled to a second pad opening of the seventh pad.
 43. Themethod of claim 25, further comprising forming a first square padcomprising four pad openings disposed near the corners of the firstsquare pad; forming a second square pad having polarity opposite thefirst square pad, comprising four pad openings disposed near the cornersof the second square pad; forming a third square pad having polarityopposite the second square pad comprising four pad openings disposednear the corners of the third square pad; forming a fourth square padhaving a polarity opposite the first square pad comprising four padopenings disposed near the corners of the first square pad; forming afirst rectangular pad proximate the first square pad comprising two padopenings at each end of the first rectangular pad and having a polarityopposite the first square pad; forming a second rectangular padproximate the first rectangular pad and distal the first square pad, thesecond rectangular pad comprising two pad openings at each end, andhaving a polarity opposite the first rectangular pad; forming a thirdrectangular pad proximate the second square pad comprising two padopenings at each end and having a polarity opposite the second squarepad; forming a fourth rectangular pad proximate the third rectangularpad and distal the second square pad, the fourth rectangular padcomprising two pad openings at each end, and having a polarity oppositethe third rectangular pad; forming a fifth rectangular pad proximate thethird square pad comprising two pad openings at each end and having apolarity opposite the third square pad; forming a sixth rectangular padproximate the fifth rectangular pad and distal the third square pad, thesixth rectangular pad comprising two pad openings at each end, andhaving a polarity opposite the fifth rectangular pad; forming a seventhrectangular pad proximate the fourth square pad comprising two padopenings at each end, and having a polarity opposite the fourth squarepad; forming an eighth rectangular pad proximate the seventh rectangularpad and distal the fourth square pad, the eighth rectangular padcomprising two pad openings at each end, and having a polarity oppositethe seventh rectangular pad; forming a first circular pad proximate tothe first square pad comprising a pad opening and having the samepolarity as the first square pad; forming a second circular padproximate to the second square pad comprising a pad opening and havingthe same polarity as the second square pad; forming a third circular padproximate to the third square pad comprising a pad opening and havingthe same polarity as the third square pad; and forming a fourth circularpad proximate to the fourth square pad comprising a pad opening andhaving the same polarity as the fourth square pad.
 44. The method ofclaim 43, further comprising coupling a first interdigitated capacitor,having at least sixteen terminals to the substrate layer wherein a firstterminal is coupled to a first pad opening of the first rectangular pad;a second terminal proximate the first terminal and with a polarityopposite the first terminal is coupled to a first pad opening of thefirst rectangular pad; a third terminal proximate the second terminaland with a polarity opposite the second terminal is coupled to a firstpad opening of the second rectangular pad; a fourth terminal proximatethe third terminal and with a polarity opposite the third terminal iscoupled to a first pad opening of the second square pad; a fifthterminal proximate the fourth terminal and with a polarity opposite thefourth terminal is coupled to a first pad opening of the thirdrectangular pad; a sixth terminal proximate the fifth terminal and witha polarity opposite the fifth terminal is coupled to a first pad openingof the fourth rectangular pad; a seventh terminal proximate the sixthterminal and with a polarity opposite the sixth terminal is coupled to afirst pad opening of the third square pad; an eighth terminal proximatethe seventh terminal and with a polarity opposite the seventh terminalis coupled to a first pad opening of the fifth rectangular pad; a ninthterminal proximate the eighth terminal and with a polarity opposite theeighth terminal is coupled to a first pad opening of the sixthrectangular pad; a tenth terminal proximate the ninth terminal and witha polarity opposite the ninth terminal is coupled to a first pad openingof the fourth square pad; a eleventh terminal proximate the tenthterminal and with a polarity opposite the tenth terminal is coupled to afirst pad opening of the seventh rectangular pad; a twelfth terminalproximate the eleventh terminal and with a polarity opposite theeleventh terminal is coupled to a first pad opening of the eighthrectangular pad; a thirteenth terminal proximate the twelfth terminaland with a polarity opposite the twelfth terminal is coupled to a firstpad opening of the first circular pad; a fourteenth terminal proximatethe thirteenth terminal and with a polarity opposite the thirteenthterminal is coupled to a first pad opening of the second circular pad; afifteenth terminal proximate the fourteenth terminal and with a polarityopposite the fourteenth terminal is coupled to a first pad opening ofthe third circular pad; a sixteenth terminal proximate the fifteenthterminal and with a polarity opposite the fifteenth terminal is coupledto a first pad opening of the fourth circular pad.
 45. The method ofclaim 44, further comprising: forming a fifth square pad having polarityopposite the third square pad, comprising four pad openings disposednear the corners of the first square pad; forming a sixth square padhaving polarity opposite the fifth square pad, comprising four padopenings disposed near the corners of the second square pad; forming aninth rectangular pad proximate the third square pad comprising two padopenings at each end and having a polarity opposite the third squarepad; forming a tenth rectangular pad proximate the ninth rectangular padand distal the third square pad, the tenth rectangular pad comprisingtwo pad openings at each end, and having a polarity opposite the ninthrectangular pad; forming an eleventh rectangular pad proximate the fifthsquare pad comprising two pad openings at each end and having a polarityopposite the fifth square pad; forming a twelfth rectangular padproximate the eleventh rectangular pad and distal the fifth square pad,the twelfth rectangular pad comprising two pad openings at each end, andhaving a polarity opposite the eleventh rectangular pad; forming athirteenth rectangular pad proximate the sixth square pad comprising twopad openings at each end and having a polarity opposite the sixth squarepad; forming a fourteenth rectangular pad proximate the thirteenthrectangular pad and distal the sixth square pad, the fourteenthrectangular pad comprising two pad openings at each end, and having apolarity opposite the thirteenth rectangular pad; forming a fifthcircular pad proximate to the fourth square pad comprising a pad openingand having the same polarity as the fourth square pad; forming a sixthcircular pad proximate to the third square pad comprising a pad openingand having the same polarity as the third square pad; forming a seventhcircular pad proximate to the fifth square pad comprising a pad openingand having the same polarity as the fifth square pad; and forming aneighth circular pad proximate to the sixth square pad comprising a padopening and having the same polarity as the sixth square pad.
 46. Themethod of claim 45, further comprising coupling a second interdigitatedcapacitor, having at least sixteen terminals to the substrate layerwherein a first terminal of the second capacitor is coupled to a secondpad opening of the fourth rectangular pad; a second terminal of thesecond capacitor proximate the first terminal of the second capacitorand with a polarity opposite the first terminal is coupled to a secondpad opening of the sixth rectangular pad; a third terminal of the secondcapacitor proximate the second terminal of the second capacitor and witha polarity opposite the second terminal of the second capacitor iscoupled to a second pad opening of the fifth rectangular pad; a fourthterminal of the second capacitor proximate the third terminal of thesecond capacitor and with a polarity opposite the third terminal of thesecond capacitor is coupled to a second pad opening of the third squarepad; a fifth terminal of the second capacitor proximate the fourthterminal of the second capacitor and with a polarity opposite the fourthterminal of the second capacitor is coupled to a first pad opening ofthe ninth rectangular pad; a sixth terminal of the second capacitorproximate the fifth terminal of the second capacitor and with a polarityopposite the fifth terminal of the second capacitor is coupled to afirst pad opening of the tenth rectangular pad; a seventh terminalproximate the sixth terminal of the second capacitor and with a polarityopposite the sixth terminal of the second capacitor is coupled to afirst pad opening of the fifth square pad; an eighth terminal of thesecond capacitor proximate the seventh terminal of the second capacitorand with a polarity opposite the seventh terminal of the secondcapacitor is coupled to a first pad opening of the eleventh rectangularpad; a ninth terminal of the second capacitor proximate the eighthterminal of the second capacitor and with a polarity opposite the eighthterminal of the second capacitor is coupled to a first pad opening ofthe twelfth rectangular pad; a tenth terminal of the second capacitorproximate the ninth terminal of the second capacitor and with a polarityopposite the ninth terminal of the second capacitor is coupled to afirst pad opening of the sixth square pad; an eleventh terminal of thesecond capacitor proximate the tenth terminal of the second capacitorand with a polarity opposite the tenth terminal of the second capacitoris coupled to a first pad opening of the thirteenth rectangular pad; atwelfth terminal of the second capacitor proximate the eleventh terminaland with a polarity opposite the eleventh terminal of the secondcapacitor is coupled to a first pad opening of the fourteenthrectangular pad; a thirteenth terminal of the second capacitor proximatethe twelfth terminal of the second capacitor and with a polarityopposite the twelfth terminal of the second capacitor is coupled to afirst pad opening of the fifth circular pad; a fourteenth terminal ofthe second capacitor proximate the thirteenth terminal of the secondcapacitor and with a polarity opposite the thirteenth terminal of thesecond capacitor is coupled to a first pad opening of the sixth circularpad; a fifteenth terminal of the second capacitor proximate thefourteenth terminal of the second capacitor and with a polarity oppositethe fourteenth terminal of the second capacitor is coupled to a firstpad opening of the seventh circular pad; and a sixteenth terminal of thesecond capacitor proximate the fifteenth terminal of the secondcapacitor and with a polarity opposite the fifteenth terminal of thesecond capacitor is coupled to a first pad opening of the eighthcircular pad.